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Hydrogen-containing Ta 2 O 5 (Ta 2 O 5 :H) thin films are considered to be a candidate for a proton-conducting solid-oxide electrolyte. In this study, Ta 2 O 5 :H thin films were prepared by reactively sputtering a Ta metal target in an O 2 +H 2 O mixed gas. The effects of sputtering power and post-deposition heat treatment on the ion...
In order to clarify the interactions of ethanol cluster ions with solid surfaces such as Si(100), SiO 2 and Au surfaces, sputtering effects were investigated by changing the acceleration voltage and incident angle (θ) of the cluster ions. The sputtered depth at a normal incidence of θ=0° increased with an increase of the acceleration voltage. The sputtering ratio of Si to SiO 2 was...
Amorphous transparent conductive oxide films in the In–Zn–O system were deposited on polycarbonate (PC) substrates by simultaneous DC sputtering of an In 2 O 3 target and a ZnO target with either 4wt% Al 2 O 3 or 7.5wt% Ga 2 O 3 impurities. Although the resistivity of the amorphous, non-doped In–Zn–O film on PC was about one order of magnitude higher...
High magnetic fields up to 10T are applied to thermal chemical vapor deposition (CVD) for carbon nanotube synthesis in order to control the nanotube morphology. Although changes of the nanotube morphology in the presence of magnetic field were not obviously discernible in the SEM images, an increase in the onion-like nano-carbons due to magnetic field was observed by TEM. It suggests that the magnetic...
We are developing switchable mirror thin films based on an Mg–Ni alloy which can be switched between mirror and transparent states. The Mg 4 Ni alloy thin film was prepared on a glass substrate by DC magnetron co-sputtering of Mg and Ni targets and was subsequently covered in situ with a thin layer of Pd. The interface structure between Pd and Mg–Ni layers was found to have a crucial effect...
We have designed and developed a sputtering deposition apparatus to fabricate a cylindrical spring-like microstructure for a titanium–nickel (Ti–Ni) shape memory alloy (SMA) film-actuated micro-catheter. The developed apparatus that mainly consists of gearboxes to transform rotation of a stage into rotation of a shaft specimen is mounted on a ternary-source sputtering system. By using this system,...
Influence of incorporation of Ga in amorphous In–Zn–O transparent conductive oxide films was investigated as a function of Zn/(Zn+In). For In–Zn–O films with no Ga 2 O 3 , the range of Zn/(Zn+In) ratio where the amorphous phase appears became narrow at a substrate temperature of 250°C. With increasing Ga 2 O 3 quantity, amorphous films were obtained even at a high substrate...
Enhancement of surface plasmon resonance (SPR) in optical absorption has been found on Cu ion-implanted SiO 2 substrate modified by micro-indentation and post-annealing. Micro-indentation effects on surface plasmon resonance (SPR) in optical absorption have been studied to control nanoparticle formation in Cu ion-implanted SiO 2 substrate. The SiO 2 was firstly implanted with...
The effects of a metal oxide under-layer on the resistivity of a Ag layer were investigated. Ag-based multilayers, which have a layer construction of glass/ZnO under-layer/Ag/ZAO (Al-doped ZnO) blocker/ZnO top layer, were deposited by DC magnetron sputtering with changing the sputter gas pressure during the under-layer deposition and it was confirmed that the Ag layer showed low resistivity when the...
To further understanding of the effect of Zr content on the shape memory behavior of ternary Ti–Ni–Zr alloy films, ternary alloy films were deposited with various Zr contents using triple source dc magnetron sputtering. Deposited films annealed at 700°C showed martensite transformation accompanied with shape memory behavior. Martensitic transformation start (Ms) temperature of the ternary alloy film...
This paper aims to investigate the influence of hydrogen on the variation of mechanical properties and microstructure of diamond-like carbon (DLC) films synthesized by radio frequency plasma chemical vapor deposition (r.f.-PECVD). The DLC films were deposited on a silicon substrate (p-type). The reactant gases employed in this paper are a mixture of acetylene and hydrogen. The ratio of hydrogen in...
We prepared Cr-doped titanium dioxide (TiO 2 ) films by oxygen (O 2 ) cluster ion beam assisted deposition method, and investigated photocatalytic properties of the films as well as crystallographic property, optical property and surface morphology. The films prepared at a substrate temperature below 200°C were found to be amorphous from the X-ray diffraction measurement. For the substrate...
The surfaces of KCl crystals were sputtered by irradiation with 5keV electrons (500μA/m 2 ), in order to create a high density of surface steps. Energy loss distributions of 550keV protons at glancing angle incidence scattered from the (001) surface were then measured for random (100mrad off 〈100〉 direction) and surface-channeling (〈100〉 direction) conditions. The surfaces were examined using...
Alloy nanotubes were successfully grown by self-organization. They were produced by annealing of carbon–nickel–indium mixture thin films that were prepared by pulsed laser deposition. The morphology was observed and analysed by both scanning and transmission electron microscopes. The diameters were tens of nanometres and the aspect ratios were more than 2500. The growth is suggested to be due to the...
Moisture durability of ZnO transparent conductive films was achieved with Ga heavy doping by off-axis type rf magnetron sputtering. The resistivity of 10.9at.% Ga-doped ZnO was 1.3×10 −3 Ωcm and changed less than 5% of resistivity over a 9400-h reliability test at a temperature of 85°C and humidity of 85%. The crystal structural analysis of the heavily Ga-doped ZnO films indicated that the...
TiO 2 /SnO 2 stacked-layers are synthesized by reactive sputter deposition on the glass substrate. Very thin TiO 2 /SnO 2 bilayer-photocatalysts exhibited a very high photocatalytic activity for a degradation of gaseous acetaldehyde. Both the control of an electronic structure of TiO 2 overlayer in the near-surface region and the interfacial separation of photogenerated...
ZrO 2 films were deposited by reactive gas flow sputtering (GFS) where voltage is applied to a cyindrical hollow-cathode target from a DC source, the discharge being produced at relatively high sputtering pressure. In this system, secondary electrons form a major component of the total current flow and lead to heating of the substrate which in turn has an effect on the properties of deposited...
Organic polymer thin films deposited by sputtering using polytetrafluoroethylene (PTFE) and polyimide (PI) targets were investigated with Fourier Transform Infrared Spectroscopy (FTIR), X-ray Photoelectron Spectroscopy (XPS), and Scanning Electron Microscopy (SEM). Films deposited from the PTFE target were poly-hydro-fluoro-carbon. The thin films showed water repellency with an H 2 O contact...
In this work, an activated carbon sheet was modified, to improve capacitance and energy density of electric double layer capacitors (EDLCs). Surfaces were treated with plasma for selected times of 1, 5, 10, 20, and 30min. The plasma source was a DC glow discharge in argon gas. The pressure was 20Pa and the distance between positive and negative electrodes was 20mm. DC power was 70W. The activated...
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